Demand Controlled Filtration in an Industrial Cleanroom

Faulkner, David ; DiBartolomeo, Dennis ; Wang, Duo

Lawrence Berkeley National Laboratory

关键词: Blowers;    Testing;    Filtration;    32;    Velocity;   

DOI  :  10.2172/917412
RP-ID  :  LBNL--63420
RP-ID  :  DE-AC02-05CH11231
RP-ID  :  917412

美国|英语

来源: UNT Digital Library

【 摘 要 】

In an industrial cleanroom, significant energy savings were realized by implementing two types of demand controlled filtration (DCF) strategies, one based on particle counts and one on occupancy. With each strategy the speed of the recirculation fan filter units was reduced to save energy. When the control was based on particle counts, the energy use was 60% of the baseline configuration of continuous fan operation. With simple occupancy sensors, the energy usage was 63% of the baseline configuration. During the testing of DCF, no complaints were registered by the operator of the cleanroom concerning processes and products being affected by the DCF implementation.