Opportunities for sustainable design and operation of cleanspaces: A case study on minienvironment system performance

Xu, Tengfang

Lawrence Berkeley National Laboratory

关键词: 32 Energy Conservation, Consumption, And Utilization;    Contamination;    Design;    Performance;    Energy Efficiency;   

DOI  :  10.2172/886974
RP-ID  :  LBNL--56312
RP-ID  :  DE-AC02-05CH11231
RP-ID  :  886974

美国|英语

来源: UNT Digital Library

【 摘 要 】

In order to identify and pursue energy efficiency opportunities associated with cleanrooms, it is necessary to understand the design and operation of cleanroom systems for specific contamination control requirements. With the industrial trend toward more stringent cleanliness class and tightening clean spaces, it is vital to understand the design of minienvironment and the operational performance of its systems. A good understanding of such system performance would help to identify opportunities in efficient energy end-use and wise allocation of resources associated with processes or productions that require minienvironments and cleanrooms. This report summarizes a case study on energy performance of a common minienvironment used in semiconductor industry, and discusses the opportunities in saving energy, in particular, the opportunities in achieving efficient operation and design that entails applications of minienvironments.