High Gain, Fast Scan, Broad Spectrum, Parallel Beam Wavelength Dispersive X-ray Spectrometer for SEM

OHara, David ; Lochmer, Dr. Eric

Parallax Research, Inc. (United States)

关键词: Energy Resolution;    X-Ray Spectroscopy X-Ray Spectroscopy;    Reflection;    X-Ray Spectroscopy;    Wavelengths;   

DOI  :  10.2172/814961
RP-ID  :  Final Report
RP-ID  :  FG02-02ER83545
RP-ID  :  814961

美国|英语

来源: UNT Digital Library

【 摘 要 】

Parallax Research, Inc. proposes to produce a new type of x-ray spectrometer for use with Scanning Electron Microscopy (SEM) that would have the energy resolution of WDS and the ease of use of EDS with sufficient gain for lower energies that it can be used at low beam currents as is EDS. Parallax proposes to do this by development of new multiple reflection x-ray collimation optics, new diffractor technology, new detector technology and new scan algorithms.