An Investigation into the Response of a Micro Electro Mechanical Compound Pivot Mirror Using Finite Element Modeling

GASS, FAWN R. ; DOHNER, JEFFREY L.

Sandia National Laboratories

关键词: Miniaturization;    Mirrors;    Computerized Simulation;    Response Functions;    42 Engineering;   

DOI  :  10.2172/793321
RP-ID  :  SAND2002-0247
RP-ID  :  AC04-94AL85000
RP-ID  :  793321

美国|英语

来源: UNT Digital Library

【 摘 要 】

This report is a presentation of modeling and simulation work for analyzing three designs of Micro Electro Mechanical (MEM) Compound Pivot Mirrors (CPM). These CPMs were made at Sandia National Laboratories using the SUMMiT{trademark} process. At 75 volts and above, initial experimental analysis of fabricated mirrors showed tilt angles of up to 7.5 degrees for one design, and 5 degrees for the other two. Nevertheless, geometric design models predicted higher tilt angles. Therefore, a detailed study was conducted to explain why lower tilt angles occurred and if design modifications could be made to produce higher tilt angles at lower voltages. This study showed that the spring stiffnesses of the CPMs were too great to allow for desired levels of rotation at lower levels of voltage. To produce these lower stiffnesses, a redesign is needed.