Characterization of Sidewall and Planar Surfaces of Electroformed LIGA Parts

PRASAD,SOMURI V. ; HALL,AARON C. ; DUGGER,MICHAEL T.

Sandia National Laboratories

关键词: Copper;    Removal;    Nickel;    Bearings;    Sliding Friction;   

DOI  :  10.2172/766231
RP-ID  :  SAND2000-1702
RP-ID  :  AC04-94AL85000
RP-ID  :  766231

美国|英语

来源: UNT Digital Library

【 摘 要 】

The nature of surfaces and the way they interact with each other during sliding contact can have a direct bearing on the performance of a microelectromechanical (MEMS) device. Therefore, a study was undertaken to characterize the surfaces of LIGA fabricated Ni and Cu components. Sidewall and planar surfaces were examined by scanning electron microscopy (SEM) and atomic force microscopy (AFM). Surface roughness was quantified using the AFM. Post-processing (e.g. lapping, removal of polymer film) can profoundly influence the morphology of LIGA components. Edge rounding and smearing of ductile materials during lapping can result in undesirable sidewall morphologies. By judicious selection of AFM scan sizes, the native roughness ({approximately}10 nm RMS) can be distinguished from that arising due to post processing, e.g. scratches, debris, polymer films. While certain processing effects on morphology such as those due to lapping or release etch can be controlled, the true side wall morphology appears to be governed by the morphology of the polymer mold or by the electroforming process itself, and may be much less amenable to modification.