Deterministic, Nanoscale Fabrication of Mesoscale Objects

Jr., R M ; Gilmer, J ; Rubenchik, A ; Shirk, M

Lawrence Livermore National Laboratory

关键词: Copper;    Chemical Reactions;    Nickel;    Vanadium;    Gold;   

DOI  :  10.2172/15015179
RP-ID  :  UCRL-TR-209392
RP-ID  :  W-7405-ENG-48
RP-ID  :  15015179

美国|英语

来源: UNT Digital Library

【 摘 要 】

Neither LLNL nor any other organization has the capability to perform deterministic fabrication of mm-sized objects with arbitrary, {micro}m-sized, 3-D features and with 100-nm-scale accuracy and smoothness. This is particularly true for materials such as high explosives and low-density aerogels, as well as materials such as diamond and vanadium. The motivation for this project was to investigate the physics and chemistry that control the interactions of solid surfaces with laser beams and ion beams, with a view towards their applicability to the desired deterministic fabrication processes. As part of this LDRD project, one of our goals was to advance the state of the art for experimental work, but, in order to create ultimately a deterministic capability for such precision micromachining, another goal was to form a new modeling/simulation capability that could also extend the state of the art in this field. We have achieved both goals. In this project, we have, for the first time, combined a 1-D hydrocode (''HYADES'') with a 3-D molecular dynamics simulator (''MDCASK'') in our modeling studies. In FY02 and FY03, we investigated the ablation/surface-modification processes that occur on copper, gold, and nickel substrates with the use of sub-ps laser pulses. In FY04, we investigated laser ablation of carbon, including laser-enhanced chemical reaction on the carbon surface for both vitreous carbon and carbon aerogels. Both experimental and modeling results will be presented in the report that follows. The immediate impact of our investigation was a much better understanding of the chemical and physical processes that ensure when solid materials are exposed to femtosecond laser pulses. More broadly, we have better positioned LLNL to design a cluster tool for fabricating mesoscale objects utilizing laser pulses and ion-beams as well as more traditional machining/manufacturing techniques for applications such as components in NIF targets, remote sensors, including diagnostic systems, miniature fuels cells, and medical technologies.