ACTINIC MASK INSPECTION AT THE ALS: RISK REDUCTION ACTIVITIES FOR 2003

Barty, A ; Levesque, R ; Ayers, J ; Liu, Y ; Gullikson, E ; Barale, P

Lawrence Livermore National Laboratory

关键词: Lawrence Livermore National Laboratory;    Technology Transfer;    71 Classical And Quantumm Mechanics, General Physics;    Safety;   

DOI  :  10.2172/15013831
RP-ID  :  UCRL-SR-201686
RP-ID  :  W-7405-ENG-48
RP-ID  :  15013831

美国|英语

来源: UNT Digital Library

【 摘 要 】

This document reports on risk reduction activities performed at the VNL during CY2003 as a part of the Lith-343 actinic inspection project funded by International SEMATECH. The risk reduction activities described in this document comprise deliverable items 3.1.3, 3.1.4, 3.1.5 and 3.1.6 of Amendment 6 to the VNL EUV mask blank technology transfer contract.