科技报告详细信息
| Upgrade and Operation of the Second Generation Two-Modulator Generalized Ellipsometry Microscope (2-MGEM2) | |
| Jellison Jr, Gerald Earle ; Hunn, John D ; Breninger, Andrew H. | |
| Oak Ridge National Laboratory | |
| 关键词: Agr; Triso; 2-Mgem; | |
| DOI : 10.2172/1076912 RP-ID : ORNL/TM-2013/162 RP-ID : DE-AC05-00OR22725 RP-ID : 1076912 |
|
| 美国|英语 | |
| 来源: UNT Digital Library | |
 PDF
|
|
【 预 览 】
| Files | Size | Format | View |
|---|---|---|---|
| 1076912.pdf | 8049KB |  download |
878987797
028-85220240
