Electrostatic microvalves utilizing conductive nanoparticles for improved speed, lower power, and higher force actuation.

Ten Eyck, Gregory A. ; Branson, Eric D. ; Kenis, Paul J. A. (University of Illinois, Champaign Urbana) ; Desai, Amit (University of Illinois, Champaign Urbana) ; Schudel, Ben (University of Illinois, Champaign Urbana) ; Givler, Richard C. ; Tice, Josh (University of Illinois, Champaign Urbana) ; Collord, Andrew ; Apblett, Christopher Alan ; Cook, Adam W.

Sandia National Laboratories

关键词: 77 Nanoscience And Nanotechnology;    Electrostatics;    Air;    Velocity;    Nanotubes;   

DOI  :  10.2172/1028940
RP-ID  :  SAND2009-6329
RP-ID  :  AC04-94AL85000
RP-ID  :  1028940

美国|英语

来源: UNT Digital Library

【 摘 要 】

We have designed and built electrostatically actuated microvalves compatible with integration into a PDMS based microfluidic system. The key innovation for electrostatic actuation was the incorporation of carbon nanotubes into the PDMS valve membrane, allowing for electrostatic charging of the PDMS layer and subsequent discharging, while still allowing for significant distention of the valveseat for low voltage control of the system. Nanoparticles were applied to semi-cured PDMS using a stamp transfer method, and then cured fully to make the valve seats. DC actuation in air of these valves yielded operational voltages as low as 15V, by using a supporting structure above the valve seat that allowed sufficient restoring forces to be applied while not enhancing actuation forces to raise the valve actuation potential. Both actuate to open and actuate to close valves have been demonstrated, and integrated into a microfluidic platform, and demonstrated fluidic control using electrostatic valves.