Heights integrated model as instrument for simulation of hydrodynamic, radiation transport, and heat conduction phenomena of laser-produced plasma in EUV applications.

Sizyuk, V. ; Hassanein, A. ; Morozov, V. ; Sizyuk, T. ; Mathematics and Computer Science

关键词: 97;    H CODES;    HYDRODYNAMICS;    LASER-PRODUCED PLASMA;    RADIATION TRANSPORT;    COMPUTERIZED SIMULATION;    HEAT TRANSFER;    EXTREME ULTRAVIOLET RADIATION;    INTEGRATED CIRCUITS;    FABRICATION;   

DOI  :  10.2172/932939
RP-ID  :  ANL-MCS-CPH-06/56
PID  :  OSTI ID: 932939
Others  :  TRN: US200814%%681

学科分类：工程和技术（综合）

美国|英语

来源: SciTech Connect

【 摘 要 】

The HEIGHTS integrated model has been developed as an instrument for simulation and optimization of laser-produced plasma (LPP) sources relevant to extreme ultraviolet (EUV) lithography. The model combines three general parts: hydrodynamics, radiation transport, and heat conduction. The first part employs a total variation diminishing scheme in the Lax-Friedrich formulation (TVD-LF); the second part, a Monte Carlo model; and the third part, implicit schemes with sparse matrix technology. All model parts consider physical processes in three-dimensional geometry. The influence of a generated magnetic field on laser plasma behavior was estimated, and it was found that this effect could be neglected for laser intensities relevant to EUV (up to {approx}10{sup 12} W/cm{sup 2}). All applied schemes were tested on analytical problems separately. Benchmark modeling of the full EUV source problem with a planar tin target showed good correspondence with experimental and theoretical data. Preliminary results are presented for tin droplet- and planar-target LPP devices. The influence of three-dimensional effects on EUV properties of source is discussed.