Synthesis of silicon and germanium nanowires.

Clement, Teresa J. (Arizona State University) ; Hsu, Julia W. P.

关键词: QUANTUM WIRES;    FABRICATION;    GERMANIUM;    PRECURSOR;    SILICON;    SYNTHESIS;    MONITORING Nucleation.;    Nanowires.;    Gases.;   

DOI  :  10.2172/945179
RP-ID  :  SAND2007-6795
PID  :  OSTI ID: 945179
Others  :  TRN: US200903%%8

美国|英语

来源: SciTech Connect

【 摘 要 】

The vapor-liquid-solid growth process for synthesis of group-IV semiconducting nanowires using silane, germane, disilane and digermane precursor gases has been investigated. The nanowire growth process combines in situ gold seed formation by vapor deposition on atomically clean silicon (111) surfaces, in situ growth from the gaseous precursor(s), and real-time monitoring of nanowire growth as a function of temperature and pressure by a novel optical reflectometry technique. A significant dependence on precursor pressure and growth temperature for the synthesis of silicon and germanium nanowires is observed, depending on the stability of the specific precursor used. Also, the presence of a nucleation time for the onset of nanowire growth has been found using our new in situ optical reflectometry technique.