Uncooled Micro-Cantilever Infrared Imager Optimization

Panagiotis, Datskos G.¹ 

[1] ORNL

关键词: COATINGS;    DATA PROCESSING;    DEPOSITION;    DESIGN;    FABRICATION;    LIGHT SOURCES;    OPTIMIZATION;    ORNL;    PERFORMANCE;    RESOLUTION;    TRANSDUCERS;   

DOI  :  10.2172/940309
RP-ID  :  ORNL03-0679
PID  :  OSTI ID: 940309
Others  :  Other: CR03000679
Others  :  CRADA Final Report
Others  :  TRN: US200824%%253

学科分类：工程和技术（综合）

美国|英语

来源: SciTech Connect

【 摘 要 】

We report on the development, fabrication and characterization of microcantilever based uncooled focal plane array (FPA) for infrared imaging. By combining a streamlined design of microcantilever thermal transducers with a highly efficient optical readout, we minimized the fabrication complexity while achieving a competitive level of imaging performance. The microcantilever FPAs were fabricated using a straightforward fabrication process that involved only three photolithographic steps (i.e. three masks). A designed and constructed prototype of an IR imager employed a simple optical readout based on a noncoherent low-power light source. The main figures of merit of the IR imager were found to be comparable to those of uncooled MEMS infrared detectors with substantially higher degree of fabrication complexity. In particular, the NETD and the response time of the implemented MEMS IR detector were measured to be as low as 0.5K and 6 ms, respectively. The potential of the implemented designs can also be concluded from the fact that the constructed prototype enabled IR imaging of close to room temperature objects without the use of any advanced data processing. The most unique and practically valuable feature of the implemented FPAs, however, is their scalability to high resolution formats, such as 2000 x 2000, without progressively growing device complexity and cost. The overall technical objective of the proposed work was to develop uncooled infrared arrays based on micromechanical sensors. Currently used miniature sensors use a number of different readout techniques to accomplish the sensing. The use of optical readout techniques sensing require the deposition of thin coatings on the surface of micromechanical thermal detectors. Oak Ridge National Laboratory (ORNL) is uniquely qualified to perform the required research and development (R&D) services that will assist our ongoing activities. Over the past decade ORNL has developed a number of unique methods and techniques that led to improved sensors using a number of different approaches.