The Sandia MEMS passive shock sensor : FY08 design summary.

Walraven, Jeremy Allen ; Baker, Michael Sean ; Clemens, Rebecca C. ; Mitchell, John Anthony ; Brake, Matthew Robert ; Epp, David S. ; Wittwer, Jonathan W.

关键词: SENSORS;    DESIGN;    MATHEMATICAL MODELS;    SHOCK WAVES;    MONITORING;    MICROELECTRONICS;    SENSITIVITY Microelectromechanical systems-Design and construction.;    Shock waves-Measurement.;   

DOI  :  10.2172/945193
RP-ID  :  SAND2008-7203
PID  :  OSTI ID: 945193
Others  :  TRN: US200903%%10

学科分类：工程和技术（综合）

美国|英语

来源: SciTech Connect

【 摘 要 】

This report summarizes design and modeling activities for the MEMS passive shock sensor. It provides a description of past design revisions, including the purposes and major differences between design revisions but with a focus on Revisions 4 through 7 and the work performed in fiscal year 2008 (FY08). This report is a reference for comparing different designs; it summarizes design parameters and analysis results, and identifies test structures. It also highlights some of the changes and or additions to models previously documented [Mitchell et al. 2006, Mitchell et al. 2008] such as the way uncertainty thresholds are analyzed and reported. It also includes dynamic simulation results used to investigate how positioning of hard stops may reduce vibration sensitivity.