High gain, Fast Scan, Broad Spectrum Parallel Beam Wavelength Dispersive X-ray Spectrometer for SEM

OHara, David

关键词: X-ray Spectroscopy;    Wavelength Dispersive Spectrometer;    Electron microscope;    SEM;   

DOI  :  10.2172/952205
RP-ID  :  DOE/ER/83545-FR
PID  :  OSTI ID: 952205

学科分类：工程和技术（综合）

美国|英语

来源: SciTech Connect

【 摘 要 】

During contract # DE-FG02-ER83545, Parallax Research, Inc. developed a High gain, Fast Scan Broad Spectrum Parallel beam Wavelength Dispersive X-ray Spectrometer for use on Scanning Electron Microscopes (SEM). This new spectrometer allows very fast high resolution elemental analysis of samples in an electron microscope. By comparison to previous WDS spectrometers, it can change from one energy position to another very quickly and has an extended range compared to some similar products.