Ultra-thin multilayer capacitors.

Renk, Timothy Jerome ; Monson, Todd C.

关键词: CAPACITORS;    THIN FILMS;    PLZT;    ENERGY BEAM DEPOSITION;    FABRICATION;    ION BEAMS;    PERMITTIVITY;    THERMAL EXPANSION Zirconium compounds.;    Ceramic capacitors.;    Capacitors-Design and construction.;   

DOI  :  10.2172/973850
RP-ID  :  SAND2009-4069
PID  :  OSTI ID: 973850
Others  :  TRN: US201007%%193

美国|英语

来源: SciTech Connect

【 摘 要 】

The fabrication of ultra-thin lanthanum-doped lead zirconium titanate (PLZT) multilayer ceramic capacitors (MLCCs) using a high-power pulsed ion beam was studied. The deposition experiments were conducted on the RHEPP-1 facility at Sandia National Laboratories. The goal of this work was to increase the energy density of ceramic capacitors through the formation of a multilayer device with excellent materials properties, dielectric constant, and standoff voltage. For successful device construction, there are a number of challenging requirements including achieving correct stoichiometric and crystallographic composition of the deposited PLZT, as well as the creation of a defect free homogenous film. This report details some success in satisfying these requirements, although 900 C temperatures were necessary for PLZT perovskite phase formation. These temperatures were applied to a previously deposited multi-layer film which was then post-annealed to this temperature. The film exhibited mechanical distress attributable to differences in the coefficient of thermal expansion (CTE) of the various layers. This caused significant defects in the deposited films that led to shorts across devices. A follow-on single layer deposition without post-anneal produced smooth layers with good interface behavior, but without the perovskite phase formation. These issues will need to be addressed in order for ion beam deposited MLCCs to become a viable technology. It is possible that future in-situ heating during deposition may address both the CTE issue, and result in lowered processing temperatures, which in turn could raise the probability of successful MLCC formation.