Large Optic Drying Station: Summary of Dryer Certification Tests

Barbee, T W ; Ayers, S L ; Ayers, M J

关键词: CLEANING;    DRYING;    FABRICATION;    IMPLEMENTATION;    OPTICS;   

DOI  :  10.2172/967273
RP-ID  :  LLNL-TR-416579
PID  :  OSTI ID: 967273
Others  :  TRN: US200923%%529

学科分类：物理（综合）

美国|英语

来源: SciTech Connect

【 摘 要 】

The purpose of this document is to outline the methodology used to baseline and maintain the cleanliness status of the newly built and installed Large Optic Cleaning Station (LOCS). The station has currently been in use for eleven months; and after many cleaning studies and implementation of resulting improvements appears to be cleaning optics to a level that is acceptable for the fabrication of Nano-Laminates.