Materials Science Clean Room Facility at Tulane University (Final Technical Report)

Altiero, Nicholas¹ 

[1] Tulane Univ., New Orleans, LA (United States)

关键词: Clean Room;   

DOI  :  10.2172/1163118
RP-ID  :  10/28/2014
PID  :  OSTI ID: 1163118

学科分类：材料科学（综合）

美国|英语

来源: SciTech Connect

【 摘 要 】

The project involves conversion of a 3,000 sq. ft. area into a clean room facility for materials science research. It will be accomplished in phases. Phase I will involve preparation of the existing space, acquisition and installation of clean room equipped with a pulsed laser deposition (PLD) processing system, and conversion of ancillary space to facilitate the interface with the clean room. From a capital perspective, Phases II and III will involve the acquisition of additional processing, fabrication, and characterization equipment and capabilities.