Laser wafering for silicon solar.

Friedmann, Thomas Aquinas ; Sweatt, William C. ; Jared, Bradley Howell

关键词: BRICKS;    CLEAVAGE;    DESIGN;    ELECTRICITY;    ILLUMINANCE;    LASERS;    MACHINING;    MANUFACTURERS;    OPTICS;    PARITY;    PROCESSING;    RAMAN SPECTROSCOPY;    SCANNING ELECTRON MICROSCOPY;    SILICON;    THICKNESS;   

DOI  :  10.2172/1011705
RP-ID  :  SAND2011-2057
PID  :  OSTI ID: 1011705
Others  :  TRN: US1102225

学科分类：物理（综合）

美国|英语

来源: SciTech Connect

【 摘 要 】

Current technology cuts solar Si wafers by a wire saw process, resulting in 50% 'kerf' loss when machining silicon from a boule or brick into a wafer. We want to develop a kerf-free laser wafering technology that promises to eliminate such wasteful wire saw processes and achieve up to a ten-fold decrease in the g/W{sub p} (grams/peak watt) polysilicon usage from the starting polysilicon material. Compared to today's technology, this will also reduce costs ({approx}20%), embodied energy, and green-house gas GHG emissions ({approx}50%). We will use short pulse laser illumination sharply focused by a solid immersion lens to produce subsurface damage in silicon such that wafers can be mechanically cleaved from a boule or brick. For this concept to succeed, we will need to develop optics, lasers, cleaving, and high throughput processing technologies capable of producing wafers with thicknesses < 50 {micro}m with high throughput (< 10 sec./wafer). Wafer thickness scaling is the 'Moore's Law' of silicon solar. Our concept will allow solar manufacturers to skip entire generations of scaling and achieve grid parity with commercial electricity rates. Yet, this idea is largely untested and a simple demonstration is needed to provide credibility for a larger scale research and development program. The purpose of this project is to lay the groundwork to demonstrate the feasibility of laser wafering. First, to design and procure on optic train suitable for producing subsurface damage in silicon with the required damage and stress profile to promote lateral cleavage of silicon. Second, to use an existing laser to produce subsurface damage in silicon, and third, to characterize the damage using scanning electron microscopy and confocal Raman spectroscopy mapping.