Inverted Metamorphic Multijunction (IMM) Cell Processing Instructions

Duda, A. ; Ward, S. ; Young, M.

关键词: ADHESIVES;    CONCENTRATOR SOLAR CELLS;    CONCENTRATORS;    DEPOSITION;    EFFICIENCY;    ETCHING;    GALLIUM ARSENIDES;    GOLD;    NATIONAL RENEWABLE ENERGY LABORATORY;    PROCESSING;    SCHEDULES INVERTED METAMORPHIC MULTIJUNCTION;    IMM;    IMM CELL PROCESSING;    GAINP;    GAAS;    Solar Energy - Photovoltaics;   

DOI  :  10.2172/1036035
RP-ID  :  NREL/TP-5200-54049
PID  :  OSTI ID: 1036035
Others  :  TRN: US201206%%57

美国|英语

来源: SciTech Connect

【 摘 要 】

This technical report details the processing schedule used to fabricate Inverted Metamorphic Multijunction (IMM) concentrator solar cells at The National Renewable Energy Laboratory (NREL). These devices are used as experimental test structures to support the research at NREL that is focused on increasing the efficiency of photovoltaic power conversion. They are not intended to be devices suitable for deployment in working concentrator systems primarily because of heat sinking issues. The process schedule was developed to be compatible with small sample sizes and to afford relatively rapid turn-around times, in support of research efforts. The report describes the use of electro deposition of gold for both the back and front contacts. Electro-deposition is used because of its rapid turn around time and because it is a benign metallization technique that is seldom responsible for damage to the semiconductors. The layer transfer technique is detailed including the use of a commercially available adhesive and the etching away of the parent gallium arsenide substrate. Photolithography is used to define front contact grids as well as the mesa area of the cell. Finally, the selective wet chemical etchant system is introduced and its use to reveal the back contact is described.