Characterizing the Nanoscale Layers of Tomorrow___s Electronics An Application of Fourier Analysis

Payne, Christopher Bishop ; /Princeton U. /SLAC

关键词: ALGORITHMS;    FOURIER ANALYSIS;    REFLECTIVITY;    SOLAR CELLS;    THICKNESS;    THIN FILMS Instrumentation;    OTHER;   

DOI  :  10.2172/1049740
RP-ID  :  SLAC-TN-12-013
PID  :  OSTI ID: 1049740
Others  :  TRN: US201218%%601

学科分类：再生能源与代替技术

美国|英语

来源: SciTech Connect

【 摘 要 】

Thin film applications are of great interest to the semiconductor industry due to the important role they play in cutting edge technology such as thin film solar cells. X-Ray Reflectivity (XRR) characterizes thin films in a non-destructive and efficient manner yet complications exist in extracting these characteristics from raw XRR data. This study developed and tested two different algorithms to extract quantity of layers and thickness information on the nanometer scale from XRR data. It was concluded that an algorithm involving a local averaging technique revealed this information clearly in Fourier space.