A New Paradigm for X-ray Optics Nanopositioning Final Technical Report

Preissner, Curt¹  Mashrafi, Sheikh²  Royston, Thomas³ 

[1]Argonne National Lab. (ANL), Argonne, IL (United States)

[2]Univ. of Illinois, Champaign, IL (United States)

[3]Royston Engineering Research, Chicago, IL (United States)

关键词: nanoposition X-ray microscope flexure;   

DOI  :  10.2172/1237040
RP-ID  :  DOE-ANL--0004283
PID  :  OSTI ID: 1237040
Others  :  Other: 6302523020

美国|英语

来源: SciTech Connect

【 摘 要 】

Final report on A New Paradigm for X-ray Optics Nanopositioning. This detials control work and flexure stage design for an X-ray optic nanopositioning device.