Chemical vapor deposition of CoFe2O4 micropillar arrays with enhanced magnetic properties

JOURNAL OF ALLOYS AND COMPOUNDS

卷:890

Article

Aspe, B.¹  Malyeyev, A.²  Vakilinejad, A.¹  Menguelti, K.¹  Michels, A.²  Bahlawane, N.¹ 

[1] Luxembourg Inst Sci & Technol LIST, Mat Res & Technol Dept, Rue Brill, L-4422 Belvaux, Luxembourg

[2] Univ Luxembourg, Dept Phys & Mat Sci, 162A Ave Faiencerie, L-1511 Luxembourg, Luxembourg

关键词: CFO;    Ferromagnetic;    Micropillar;    CVD;    Thin films;   

DOI  :  10.1016/j.jallcom.2021.161758

来源: Elsevier

【 摘 要 】

Single-step thermal chemical vapor deposition was optimized at 400 degrees C for the growth of CoFe2O4 spinel thin films starting from the corresponding metal acetylacetonate precursors. Enhanced magnetization was observed for conditions leading to a columnar growth with a preferred (100) orientation. The implemented liquid precursor delivery secured a reliable films' composition control and a straightforward dosage of acetylacetone, as a molecular growth inhibitor, to enhance the film conformality on structured surfaces. The optimized conditions enabled an efficient micro-pore filling, and the fabricated ordered micropillar arrays feature a coercivity of 1.8 kOe and a saturation magnetization of 350 emu/cm3. The implemented state-ofthe-art up-scalable microfabrication technology, the reasonable thermal budget and the resulting high magnetic performance pave the way towards the development of innovative magnetoelectric devices. (c) 2021 The Authors. Published by Elsevier B.V. CC_BY_4.0

【 授权许可】

Free