Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries

JOURNAL OF POWER SOURCES

卷:307

Article

Lobe, S.^1,2  Dellen, C.^1,2  Finsterbusch, M.^1,2  Gehrke, H. -G.^1,2  Sebold, D.^1,2  Tsai, C. -L.^1,2  Uhlenbruck, S.^1,2  Guillon, O.^1,2,3 

[1] Forschungszentrum Julich, Inst Energy & Climate Res IEK 1, Mat Synth & Proc, D-52425 Julich, Germany

[2] Julich Aachen Res Alliance JARA Energy, Julich, Germany

[3] Rhein Westfal Tech Hsch RWTH Aachen, Inst Gesteinshuttenkunde, Mauerstr 5, D-52064 Aachen, Germany

关键词: Thin film;    Li7La3Zr2O12;    Magnetron sputter deposition;    Solid electrolyte;    Solid-state batteries;   

DOI  :  10.1016/j.jpowsour.2015.12.054

来源: Elsevier

【 摘 要 】

Thin film batteries based on solid electrolytes having a garnet-structure like Li7La3Zr2O12 (LIZ) are considered as one option for safer batteries with increased power density. In this work we show the deposition of Ta- and Al-substituted LLZ thin films on stainless steel substrates by r.f. magnetron sputtering. The thin films were characterized by XRD, SEM and time-of-flight-secondary ion mass spectrometry (ToF-SIMS) to determine crystal structure, morphology and element distribution. The substrate temperature was identified to be one important parameter for the formation of cubic garnet-structured LIZ thin films. LLZ formation starts at around 650 degrees C. Single phase cubic thin films were obtained at substrate temperatures of 700 degrees C and higher. At these temperatures an interlayer is formed. Combination of SEM, ToF-SIMS and XRD indicated that this layer consists of gamma-LiAlO2. The combined total ionic conductivity of the gamma-LiAlO2 interlayer and the LIZ thin film (perpendicular to the plane) was determined to be 2.0 x 10(-9) S cm(-1) for the sample deposited at 700 degrees C. In-plane measurements showed a room temperature conductivity of 1.2 x 10(-4) S cm(-1) with an activation energy of 0.47 eV for the LLZ thin film. (C) 2016 Elsevier B.V. All rights reserved.

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