Ellipsometric detection of transitional surface structures on decapped GaAs

SURFACE SCIENCE

卷:588

Article

Vasev, AV ; Chikichev, SI ; Semyagin, BR

关键词: GaAs;    surface reconstructions;    ellipsometry;   

DOI  :  10.1016/j.susc.2005.05.042

来源: Elsevier

【 摘 要 】

Structural and optical properties of MBE-grown GaAs(001) and GaAs(111)B surfaces have been studied by reflection high-energy electron diffraction and single-wavelength ellipsometry under dynamic conditions of ramp heating after desorption of passivating As-cap-layer with and without As-4 beam applied to the surface. For a number metastable reconstruction transitions a clear correlation is established between diffraction and optical data. Boundary lines for transitional superstructures on GaAs(001) are determined as a function of As flux and corresponding activation energies are estimated. For the first time it is shown ellipsometrically that optical response of the surface is drastically different for transitions of the order double right arrow order and order double right arrow disorder type. (c) 2005 Elsevier B.V. All rights reserved.

【 授权许可】

Free