Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition

SCRIPTA MATERIALIA

卷:61

Article

Adelhelm, Christoph¹  Pickert, Thomas¹  Balden, Martin¹  Rasinski, Marcin^1,2  Plocinski, Tomasz²  Ziebert, Carlos³  Koch, Freimut¹  Maier, Hans¹ 

[1] Max Planck Inst Plasma Phys, EURATOM Assoc, D-85748 Garching, Germany

[2] Warsaw Univ Technol, Fac Mat Sci & Engn, PL-02507 Warsaw, Poland

[3] Forschungszentrum Karlsruhe, Inst Mat Res 1, D-76344 Eggenstein Leopoldshafen, Germany

关键词: Physical vapor deposition (PVD);    Thin films;    Ceramics;    Oxides;    Texture;   

DOI  :  10.1016/j.scriptamat.2009.06.031

来源: Elsevier

【 摘 要 】

Er2O3 sesquioxide thin films in the uncommon, monoclinic phase were produced for the first time by filtered cathodic arc deposition on Eurofer steel substrates. This was achieved by applying a sample bias of -250 V and deposition temperatures <= 400 degrees C. Xray diffraction texture analysis revealed a strong preferred orientation of the B-phase crystallites. Deposition at 600 degrees C without bias voltage resulted in thin films showing the regular cubic phase. A dense, columnar structure was found for both phases by scanning transmission electron microscopy. (C) 2009 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

【 授权许可】

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