Self-elongated growth of nanopores in annealed amorphous Ta2O5 films

SCRIPTA MATERIALIA

卷:66

Article

Nakamura, R.¹  Tanaka, K.¹  Ishimaru, M.¹  Sato, K.²  Konno, T. J.²  Nakajima, H.¹ 

[1] Osaka Univ, Inst Sci & Ind Res, Ibaraki, Osaka 5670047, Japan

[2] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan

关键词: Nanoporous;    Oxides;    Amorphous;    Crystallization;    Self-assembly;   

DOI  :  10.1016/j.scriptamat.2011.10.033

来源: Elsevier

【 摘 要 】

Nanoporous Ta2O5 films with oriented and elongated nanopores have been prepared by a technique which utilizes the accumulation of free volume during the crystallization of amorphous Ta2O5 annealed above 973 K. The transmission electron microscopy analyses revealed that voids were elongated in the [1 0 0] direction perpendicular to the longitudinal b axis of the orthorhombic structure. The self-assembly of a significant amount of oriented nanovoids can be contributed to the strong anisotropic crystal structure of orthorhombic Ta2O5. (C) 2011 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

【 授权许可】

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