On the origins of hardness of Cu-TiN nanolayered composites

SCRIPTA MATERIALIA

卷:109

Article

Pathak, S.¹  Li, N.¹  Maeder, X.²  Hoagland, R. G.³  Baldwin, J. K.¹  Michler, J.²  Misra, A.⁴  Wang, J.³  Mara, N. A.^1,5 

[1] Los Alamos Natl Lab, Ctr Integrated Nanotechnol, Los Alamos, NM 87545 USA

[2] Swiss Fed Labs Mat Sci & Technol, Lab Mech Mat & Nanostruct, Empa, CH-3602 Thun, Switzerland

[3] Los Alamos Natl Lab, Div Mat Sci & Technol, Los Alamos, NM 87545 USA

[4] Univ Michigan, Mat Sci & Engn, Ann Arbor, MI 48109 USA

[5] Los Alamos Natl Lab, Inst Mat Sci, Los Alamos, NM 87545 USA

关键词: Multilayers;    Hardness;    Grain size;    Layer thickness;   

DOI  :  10.1016/j.scriptamat.2015.07.015

来源: Elsevier

【 摘 要 】

We investigated the mechanical response of physical vapor deposited Cu-TiN nanolayered composites of varying layer thicknesses from 5 nm to 200 nm. Both the Cu and TiN layers were found to consist of single phase nanometer sized grains. The grain sizes in the Cu and TiN layers, measured using transmission electron microscopy and X-ray diffraction, were found to be comparable to or smaller than their respective layer thicknesses. Indentation hardness testing revealed that the hardness of such nanolayered composites exhibits a weak dependence on the layer thickness but is more correlated to their grain size. Published by Elsevier Ltd. on behalf of Acta Materialia Inc.

【 授权许可】

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