Interface controlled microstructure evolution in nanolayered thin films

SCRIPTA MATERIALIA

卷:123

Article

Bartosik, M.¹  Keckes, J.²  Persson, P. O. A.³  Riedl, H.¹  Mayrhofer, P. H.¹ 

[1] TU Wien, Inst Mat Sci & Technol, Vienna, Austria

[2] Univ Leoben, Dept Mat Phys, Leoben, Austria

[3] Linkoping Univ, Dept Phys Chem & Biol, S-58183 Linkoping, Sweden

关键词: Coherent;    Incoherent;    Interfaces;    Microstructure;    Multilayer;   

DOI  :  10.1016/j.scriptamat.2016.05.031

来源: Elsevier

【 摘 要 】

X-ray nano-diffraction and transmission electron microscopy were conducted along the thickness of a similar to 4 pm thick CrN/AlN multilayer with continuously increasing AlN layer thicknesses from similar to 1 to 15 nm on similar to 7 nm thick CrN template layers. The experiments reveal coherent growth, large columnar grains extending over several (bi-)layers for thin AlN layer thicknesses below similar to 4 nm. Above similar to 4 nm, the nucleation of the thermodynamically stable wurtzite structured AlN is favored, leading to coherency breakdown and reduction of the overall strains, disrupting the columnar microstructure and limiting the maximum grain size in film growth direction to the layer thickness. (C) 2016 Acta Materialia Inc. Published by Elsevier Ltd.

【 授权许可】

Free