Direct co-deposition of mono-sized nanoparticles during sputtering

SCRIPTA MATERIALIA

卷:186

Article

Polyakov, Mikhail N.¹  Schoeppner, Rachel L.¹  Pethoe, Laszlo¹  Edwards, Thomas E. J.¹  Thomas, Keith¹  Konnyu, Bence¹  Maeder, Xavier¹  Michler, Johann¹ 

[1] Empa Swiss Fed Labs Mat Sci & Technol, Feuerwerkerstr 39, CH-3602 Thun, Switzerland

关键词: Nanocomposites;    Nanoparticles;    Synthesis;    Thermal stability;    Sputtering;   

DOI  :  10.1016/j.scriptamat.2020.05.032

来源: Elsevier

【 摘 要 】

Nanoparticle-reinforced thin films synthesis is often limited by precipitation thermodynamics and kinetics to certain material combinations and nanoparticle size distributions. We demonstrate a new method that allows direct co-deposition of mono-sized nanoparticles with various matrix materials, independent particle size and composition control, yielding flexible material selection, and nanoparticle density spatial variations laterally and depth-wise. Tungsten nanoparticles were co-deposited into magnetron-sputtered copper, giving a uniform distribution of nanoparticles in transmission electron microscopy. To demonstrate the application potential, W nanoparticles stabilized nanograined Cu at 500 degrees C; pure Cu reference showed significant grain growth. This method opens new possibilities in tailored nanocomposite fabrication. (C) 2020 Acta Materialia Inc. Published by Elsevier Ltd.

【 授权许可】

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