RESOLNRA: A new program for optimizing the achievable depth resolution of ion beam analysis methods

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:266

Article; Proceedings Paper

Mayer, M.

关键词: ion beam analysis;    computer simulation;    depth resolution;    SIMNRA;    RESOLNRA;    RBS;    ERDA;    NRA;    straggling;   

DOI  :  10.1016/j.nimb.2007.11.071

来源: Elsevier

【 摘 要 】

The code RESOLNRA for determining the experimental conditions (incident energy and angle) in order to achieve an optimal depth resolution was developed. RESOLNRA is based on the spectrum simulation code SIMNRA. RESOLNRA treats RBS, ERDA and NRA and includes the energy broadening contributions due to electronic energy-loss straggling, geometrical straggling, multiple scattering, absorber foils and detector resolution. Additional constraints, such as minimum or maximum beam energies or tilt angles, or the requirement for a specific energy in a specific depth, can be taken into account. (c) 2007 Elsevier B.V. All rights reserved.

【 授权许可】

Free