Variable-spot ion beam figuring

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:370

Article

Wu, Lixiang¹  Qiu, Keqiang¹  Fu, Shaojun¹ 

[1] Univ Sci & Technol China, Natl Synchrotron Radiat Lab, Hefei 230029, Peoples R China

关键词: Ion beam figuring;    Variable-spot removal function;    Integral etching time;    Spatio-temporal visualization;    Trajectory optimization;   

DOI  :  10.1016/j.nimb.2016.01.009

来源: Elsevier

【 摘 要 】

This paper introduces a new scheme of ion beam figuring (IBF), or rather variable-spot IBF, which is conducted at a constant scanning velocity with variable-spot ion beam collimated by a variable diaphragm. It aims at improving the reachability and adaptation of the figuring process within the limits of machine dynamics by varying the ion beam spot size instead of the scanning velocity. In contrast to the dwell time algorithm in the conventional IBF, the variable-spot IBF adopts a new algorithm, which consists of the scan path programming and the trajectory optimization using pattern search. In this algorithm, instead of the dwell time, a new concept, integral etching time, is proposed to interpret the process of variable-spot IBF. We conducted simulations to verify its feasibility and practicality. The simulation results indicate the variable-spot IBF is a promising alternative to the conventional approach. (C) 2016 Elsevier B.V. All rights reserved.

【 授权许可】

Free