Surface modification using ionic liquid ion beams

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:341

Article

Takaoka, Gikan H.¹  Hamaguchi, Takuya¹  Takeuchi, Mitsuaki¹  Ryuto, Hiromichi¹ 

[1] Kyoto Univ, Photon & Elect Sci & Engn Ctr, Nishikyo Ku, Kyoto 6158510, Japan

关键词: Cluster ions;    Ionic liquid ions;    Polyatomic ions;    Ion beams;    Surface modification;   

DOI  :  10.1016/j.nimb.2014.06.030

来源: Elsevier

【 摘 要 】

We developed an ionic liquid (IL) ion source using 1-butyl-3-methylimidazolium hexafluorophosphate (BMIM-PF6) and produced IL ion beams by applying a high electric field between the tip and the extractor. Time-of-flight measurements showed that small cluster and fragment ions were contained in the positive and negative ion beams. The positive and negative cluster ions were deposited on Si(100) substrates. Xray photoelectron spectroscopy measurements showed that the composition of the deposited layers was similar to that of an IL solvent. This suggests that a cation (A(+)) or an anion (B-) was attached to an IL cluster (AB), resulting in the formation of positive cluster ions (AB)(n)A(+) or negative cluster ions (AB)B, respectively. The surfaces of the IL layers deposited on Si(1 00) substrates were flat at an atomic level for positive and negative cluster ion irradiation. Moreover, the contact angles of the deposited layers were similar to that of the IL solvent. Thus, surface modification of Si(100) substrates was successfully demonstrated with BMIM-PF6 cluster ion beams. (C) 2014 Elsevier B.V. All rights reserved.

【 授权许可】

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