Optimization of the depth resolution for deuterium depth profiling up to large depths

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:387

Article

Wielunska, B.¹  Mayer, M.¹  Schwarz-Selinger, T.¹ 

[1] Max Planck Inst Plasma Phys, Boltzmannstr 2, D-85748 Garching, Germany

关键词: Deuterium depth profiling;    Depth profiling;    Ion beam analysis;    D(He-3,p)He-4;    Depth resolution;    Optimization of the depth resolution;   

DOI  :  10.1016/j.nimb.2016.09.004

来源: Elsevier

【 摘 要 】

The depth resolution of deuterium depth profiling by the nuclear reaction D(He-3,p)alpha is studied theoretically and experimentally. General kinematic considerations are presented which show that the depth resolution for deuterium depth profiling using the nuclear reaction D(He-3,p)alpha is best at reaction angles of 0 degrees and 180 degrees at all incident energies below 9 MeV and for all depths and materials. In order to confirm this theoretical prediction the depth resolution was determined experimentally with a conventional detector at 135 degrees and an annular detector at 175.9 degrees. Deuterium containing thin films buried under different metal cover layers of aluminum, molybdenum and tungsten with thicknesses in the range of 0.5-11 mu m served as samples. For all materials and depths an improvement of the depth resolution with the detector at 175.9 is achieved. For tungsten as cover layer a better depth resolution up to a factor of 18 was determined. Good agreement between the experimental results and the simulations for the depth resolution is demonstrated. (C) 2016 Elsevier B.V. All rights reserved.

【 授权许可】

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