Intrinsic residual stresses in metal films synthesized by energetic particle deposition

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:175

Article; Proceedings Paper

Misra, A ; Nastasi, M

关键词: residual stress;    metal thin films;    ion-beam synthesis;    interatomic potentials;   

DOI  :  10.1016/S0168-583X(00)00537-1

来源: Elsevier

【 摘 要 】

Residual stresses are intrinsic to all physical vapor deposited coatings. Bombardment with energetic particles lions or neutrals) has a strong influence on both the sign and the magnitude of intrinsic stresses. For example, stresses can change from large tensile to large compressive with increasing particle bombardment. We develop a model for the evolution of tensile residual stress with increasing bombardment based on the hypothesis that the tensile stresses originate due to the attractive interatomic forces between the coalescing crystallites. The model predictions are shown to compare favorably with experimental results. (C) 2001 Elsevier Science B.V. All rights reserved.

【 授权许可】

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