Study of depth profile of hydrogen in hydrogenated diamond like carbon thin film using ion beam analysis techniques

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:328

Article

Datta, J.¹  Biswas, H. S.²  Rao, P.³  Reddy, G. L. N.³  Kumar, S.³  Ray, N. R.⁴  Chowdhury, D. P.¹  Reddy, A. V. R.⁵ 

[1] Ctr Variable Energy Cyclotron, BARC, Div Analyt Chem, Kolkata 700064, India

[2] Surendranath Coll, Dept Chem, Kolkata 700009, India

[3] BARC, Natl Ctr Composit Characterizat Mat, Hyderabad 500062, Andhra Pradesh, India

[4] Saha Inst Nucl Phys, Surface Phys Mat Sci Div, Kolkata 700064, India

[5] Bhabha Atom Res Ctr, Div Analyt Chem, Bombay 400085, Maharashtra, India

关键词: Hydrogen;    Depth profile;    Diamond like carbon;    Thin film;    Ion beam analysis;   

DOI  :  10.1016/j.nimb.2014.02.127

来源: Elsevier

【 摘 要 】

The Hydrogenated Diamond Like Carbon (HDLC) thin films are deposited on Silicon substrate at room temperature using asymmetric capacitively coupled RF plasma with varying flow rates of methane. These films are undergone annealing at high vacuum (similar to 10(-7) torr) and high temperature (750 and 1050 degrees C) furnace. The as-prepared and annealed HDLC films have been depth profiled for hydrogen using the resonance at 6.44 MeV in H-1(F-19,alpha gamma)O-16 nuclear reaction. The as prepared films exhibit non-uniform depth distribution of hydrogen: it decreases with depth. Annealing in vacuum brings about is a significant desorption of hydrogen from the films. Loss of hydrogen, albeit in much lower proportions, is also induced by the bombarding beam. The films also experience a mild loss of carbon, as shown by proton backscattering spectrometry, during high vacuum annealing. The depth profiles of hydrogen in the annealed films are indicative of the prevalence of graphitic carbon near film-substrate interface. (C) 2014 Elsevier B.V. All rights reserved.

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