Development of ΔE-E telescope ERDA with 40 MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:384

Article

Harayama, I.¹  Nagashima, K.¹  Hirose, Y.^2,3  Matsuzaki, H.⁴  Sekiba, D.^1,5 

[1] Univ Tsukuba, Grad Sch Pure & Appl Sci, Tennodai 1-1-1, Tsukuba, Ibaraki 3058573, Japan

[2] Univ Tokyo, Grad Sch Sci, Bunkyo Ku, 7-3-1 Hongo, Tokyo 1130033, Japan

[3] Japan Sci & Technol Agcy, CREST, Bunkyo Ku, 7-3-1 Hongo, Tokyo 1130033, Japan

[4] Univ Tokyo, Sch Engn, Bunkyo Ku, 7-3-1 Hongo, Tokyo 1138656, Japan

[5] Univ Tsukuba, Tandem Accelerator Complex, Tennodai 1-1-1, Tsukuba, Ibaraki 3058577, Japan

关键词: DE-E telescope ERDA;    Gas ionization chamber;    Light elements;    Metal oxynitride;   

DOI  :  10.1016/j.nimb.2016.07.019

来源: Elsevier

【 摘 要 】

We have developed a compact AE-E telescope elastic recoil detection analysis (ERDA) system, for the first time at Micro Analysis Laboratory, Tandem Accelerator (MALT) in the University of Tokyo, which consists of a gas ionization chamber and solid state detector (SSD) for the quantitative analysis of light elements. The gas ionization chamber is designed to identify the recoils of O and N from metal oxynitrides thin films irradiated with 40 MeV Cl-35(7+). The length of the electrodes along the beam direction is 50 mm optimized to sufficiently separate energy loss of O and N recoils in P10 gas at 6.0 x 10(3) Pa. The performance of the gas ionization chamber was examined by comparing the ERDA results on the SrTaO2N thin films with semi-empirical simulation and the chemical compositions previously determined by nuclear reaction analysis (NRA) and Rutherford backscattering spectrometry (RBS). We also confirmed availability of the gas ionization chamber for identifying not only the recoils of O and N but also those of lithium, carbon and fluorine. (C) 2016 Elsevier B.V. All rights reserved.

【 授权许可】

Free