Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:371

Article; Proceedings Paper

Lanford, W. A.¹  Parenti, M.¹  Nordell, B. J.²  Paquette, M. M.²  Caruso, A. N.²  Mantymaki, M.³  Hamalainen, J.³  Ritala, M.³  Klepper, K. B.⁴  Miikkulainen, V.⁴  Nilsen, O.⁴  Tenhaeff, W.⁵  Dudney, N.⁵  Koh, D.⁶  Banerjee, S. K.⁶  Mays, E.⁷  Bielefeld, J.⁷  King, S. W.⁷ 

[1] SUNY Albany, Dept Phys, Albany, NY 12222 USA

[2] Univ Missouri, Dept Phys & Astron, Kansas City, MO 64110 USA

[3] Univ Helsinki, Dept Chem, Box 55, FI-00014 Helsinki, Finland

[4] Univ Oslo, Dept Chem, POB 1033, N-0315 Oslo, Norway

[5] Oak Ridge Natl Lab, Div Solid State, POB 2008, Oak Ridge, TN 37831 USA

[6] Univ Texas Austin, Dept Elect & Comp Engn, 10100 Burnet Rd, Austin, TX 78758 USA

[7] Intel Corp, Log Technol Dev, Hillsboro, OR 97124 USA

关键词: NRA;    Light elements;    Electronic materials;   

DOI  :  10.1016/j.nimb.2015.10.052

来源: Elsevier

【 摘 要 】

N-15 nuclear reaction analysis (NRA) for H is combined with 1.2 MeV deuteron (D) NRA which provides a simultaneous analysis for Li, Be, B, C, N, O and F. The energy dependence of the D NRA has been measured and used to correct for the D energy loss in film being analyzed. A 2 MeV He RBS measurement is made. Film composition is determined by a self-consistent analysis of the light element NRA data combined with an RBS analysis for heavy elements. This composition is used to simulate, with no adjustable parameters, the complete RBS spectrum. Comparison of this simulated RBS spectrum with the measured spectrum provides a powerful check of the analysis. (C) 2015 Elsevier B.V. All rights reserved.

【 授权许可】

Free