Optimization of sputtered ZnO transparent conductive seed layer for flexible ZnO-nanorod-based devices

THIN SOLID FILMS

卷:634

Article; Proceedings Paper

Novak, Petr¹  Briscoe, Joe²  Kozak, Tomas^3,4  Kormunda, Martin⁵  Netrvalova, Marie¹  Bachrata, Stepanka¹ 

[1] Univ West Bohemia, New Technol Res Ctr, Univ 8, Plzen 30614, Czech Republic

[2] Queen Mary Univ London, Sch Engn & Mat Sci, London, England

[3] Univ Wast Bohemia, Dept Phys, Bohemia, Czech Republic

[4] Univ Wast Bohemia, NTIS, European Ctr Excellence, Bohemia, Czech Republic

[5] Univ JE Purkyne Usti Nad Labem, Dept Phys, Fac Sci, Ceske Mladeze 8, Usti Nad Labem 40096, Czech Republic

关键词: Flexible substrate;    Zinc oxide;    Nanorods;    Aluminium-doped zinc oxide;    Seed layer;    Magnetron sputtering;    Transparent conductive oxide;   

DOI  :  10.1016/j.tsf.2017.02.017

来源: Elsevier

【 摘 要 】

The fabrication of inorganic transparent conductive oxide films on polymer substrates has been of increasing interest due to their potential applications in the field of flexible electronics. The subject of the present work is replacing the preferably-used indium tin oxide films by an aluminium zinc oxide (AZO) film in ZnO-nanorod-based devices, combining the role of the seed layer for nanorod growth with a sheet resistance lower than 100 Omega/sq. The investigated AZO films with thickness up to 300 nm were deposited on 150 pm thick polyethylene terephthalate substrates by (i) radio-frequency magnetron sputtering from a ZnO/Al2O3 target and (ii) co-sputtering from ZnO and Al targets in an argon atmosphere. AZO films with good transparency and thickness of 160 nm and sheet resistance lower than 100 Omega/sq. were prepared by co-sputtering. It was found that co-sputtering leads to lower film resistivity due to better activation of Al atoms in the AZO film. ZnO nanorod growth was demonstrated on both types of film, and the co-sputtered AZO films were covered by a pure (undoped) ZnO film to improve the ZnO nanorod morphology. (C) 2017 Elsevier B.V. All rights reserved.

【 授权许可】

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