Tribological properties of undoped and boron-doped nanocrystalline diamond films

THIN SOLID FILMS

卷:517

Article

Liang, Qj¹  Stanishevsky, Andrei¹  Vohra, Yogesh K.¹ 

[1] Univ Alabama Birmingham, Dept Phys, Birmingham, AL 35294 USA

关键词: Nanocrystalline diamond;    Tribology;    Microwave Plasma Assisted Chemical Vapor Deposition;    Boron doping;   

DOI  :  10.1016/j.tsf.2008.08.171

来源: Elsevier

【 摘 要 】

Undoped and boron-doped nanocrystalline (NCD) diamond films were deposited on mirror polished Ti-6Al-4V substrates in a Microwave Plasma Assisted Chemical Vapor Deposition system. Sliding wear tests were conducted in ambient air with a nanotribometer. A systematic study of the tribological properties for both undoped and boron-doped NCD films were carried out. It was found for diamond/diamond sliding, coefficient of friction decreases with increasing normal loads. It was also found that the wear rate of boron-doped NCD films is about 10 times higher than that of undoped films. A wear rate of similar to 5.2 x 10(-9) mm(3)/Nm was found for undoped NCD films. This value is comparable to the best known value of that of polished polycrystalline diamond films. Although no surface deformation, film delamination or micro-cracking were observed for undoped films, boron-doped NCD film undergoes a critical failure at a normal stress of 2.2 GPa, above which surface deformation is evident. Combined with high hardness and modulus, tunable conductivity and improved open air thermal stability, boron-doped nanocrystalline diamond film has tremendous potentials for applications such as Atomic Force Microscope probes, Micro-Electro-Mechanical System devices and biomedical sensors. (C) 2008 Elsevier B.V. All rights reserved.

【 授权许可】

Free