Optical properties of a nanostructured glass-based film using spectroscopic ellipsometry

THIN SOLID FILMS

卷:617

Article; Proceedings Paper

Jellison, G. E., Jr.¹  Aytug, T.²  Lupini, A. R.³  Paranthaman, M. P.²  Joshi, P. C.³ 

[1] Oak Ridge Natl Lab, POB 2008,Mail Stop 6069, Oak Ridge, TN 37831 USA

[2] Oak Ridge Natl Lab, Div Chem Sci, POB 2008,Mail Stop 6100, Oak Ridge, TN 37831 USA

[3] Oak Ridge Natl Lab, Div Mat Sci & Technol, POB 2008,Mail Stop 6071, Oak Ridge, TN 37831 USA

关键词: Spectroscopic ellipsometry;    Nanostructured glass films;    Bruggeman effective medium approximation;    Incomplete beta function;   

DOI  :  10.1016/j.tsf.2015.12.046

来源: Elsevier

【 摘 要 】

Nanostructured glass films, which are fabricated using spinodally phase-separated low-alkali glasses, have several interesting and useful characteristics, including being robust, non-wetting and antireflective. Spectroscopic ellipsometry measurements have been performed on one such film and its optical properties were analyzed using a 5-layer structural model of the near-surface region. Since the glass and the film are transparent over the spectral region of the measurement, the Sellmeier model is used to parameterize the dispersion in the refractive index. To simulate the variation of the optical properties of the film over the spot size of the ellipsometer (similar to 3 x 5 mm), the Sellmeier amplitude is convoluted using a Gaussian distribution. The transition layers between the ambient and the film and between the film and the substrate are modeled as graded layers, where the refractive index varies as a function of depth. These layers are modeled using a two-component Bruggeman effective medium approximation where the two components are the layer above and the layer below. The fraction is continuous through the transition layer and is modelled using the incomplete beta function. (C) 2016 Elsevier B.V. All rights reserved.

【 授权许可】

Free