Fatigue-resistant epitaxial Pb(Zr,Ti)O3 capacitors on Pt electrode with ultra-thin SrTiO3 template layers

THIN SOLID FILMS

卷:516

Article

Takahara, Seiichi¹  Morimoto, Akiharu¹  Kawae, Takeshi¹  Kumeda, Minoru¹  Yamada, Satoru²  Ohtsubo, Shigeru²  Yonezawa, Yasuto³ 

[1] Kanazawa Univ, Grad Sch Nat Sci & Technol, Div Elect Eng & Comp Sci, Kanazawa, Ishikawa 9201192, Japan

[2] Ishikawa Natl Coll Technol, Dept Elect Engn, Tsubata 9290392, Japan

[3] Ind Res Inst Ishikawa, Kanazawa, Ishikawa 9200223, Japan

关键词: Ferroelectric properties;    Lead zirconate-titanate (PZT);    Pulsed laser deposition (PLD);    Strontium Titanate (STO);   

DOI  :  10.1016/j.tsf.2008.04.078

来源: Elsevier

【 摘 要 】

Lead zirconate-titanate Pb(Zr,Ti)O-3 (PZT) capacitors with Pt bottom electrodes were prepared on MgO substrates by pulsed laser deposition (PLD) technique employing SrTiO3 (STO) template layer. Perovskite PZT thin films are prepared via stoichiometric target using the ultra-thin STO template layers while it is quite difficult to obtain the perovskite PZT on Pt electrode via stoichiometric target in PLD process. The PZT capacitor prepared with the STO template layer showed good hysteresis and leakage current characteristics, and it showed an excellent fatigue resistance. The ultra-thin STO template layers were characterized by angle-resolved X-ray photoelectron spectroscopy measurement. The effect of the STO template layer is discussed based on the viewpoint of the perovskite nucleation and diffusion of Pb and O atoms. (C) 2008 Elsevier B.V. All rights reserved.

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