Corrosion protection of steel with multilayer coatings: Improving the sealing properties of physical vapor deposition CrN coatings with Al2O3/TiO2 atomic layer deposition nanolaminates

THIN SOLID FILMS

卷:627

Article

Leppaniemi, Jarmo¹  Sippola, Perttu²  Broas, Mikael³  Aromaa, Jari¹  Lipsanen, Harri²  Koskinen, Jari¹ 

[1] Aalto Univ, Dept Mat Sci, Sch Chem Technol, POB 16100, FI-00076 Espoo, Finland

[2] Aalto Univ, Dept Micro & Nanosci, Sch Elect Engn, POB 13500, FI-00076 Espoo, Finland

[3] Aalto Univ, Dept Elect Engn & Automat, Sch Elect Engn, POB 13500, FI-00076 Espoo, Finland

关键词: Corrosion;    Defects;    Electrochemical properties;    Multilayer;    Physical vapor deposition;    Atomic layer deposition;    Thin films;    Steel;   

DOI  :  10.1016/j.tsf.2017.02.050

来源: Elsevier

【 摘 要 】

Atomic Layer Deposition (ALD) of Al2O3/TiO2 nanolaminate was applied to improve the sealing properties of CrN coating deposited with Physical Vapor Deposition (PVD) on high speed steel (HSS). The corrosion protection properties were explored with Linear Sweep Voltammetry and visual estimation. Nearly two orders of magnitude decrease in corrosion current density was obtained by applying plasma pre-treatment prior to ALD coating. Sealing of CrN pinholes was shown with Focused Ion Beam/Scanning Electron Microscope technique. The effect of the ALD deposition parameters to adhesion of the ALD coatings was investigated with Rockwell indentation and microscope analysis. Thickness and refractive index of the ALD coatings were measured with ellipsometry, and density and roughness of the ALD coatings were investigated with X-Ray Reflectivity measurements. Neutral Salt Spray testing was used to investigate the corrosion resistance of PVD/ALD nanolaminates on HSS dental curettes. (C) 2017 Elsevier B.V. All rights reserved.

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