Structural mosaicity and electrical properties of pyrolytic SnO2:F thin films

THIN SOLID FILMS

卷:531

Article

Garces, F. A.¹  Budini, N.¹  Koropecki, R. R.^1,2  Arce, R. D.^1,2 

[1] UNL CONICET, Inst Desarrollo Tecnol Ind Quim, Santa Fe, Argentina

[2] UNL, Fac Ingn Quim, Santa Fe, Argentina

关键词: Mosaicity;    Sol-Gel;    Spray deposition;    Tin dioxide;    Transparent conducting oxide;    X-ray diffraction;   

DOI  :  10.1016/j.tsf.2013.01.020

来源: Elsevier

【 摘 要 】

this work we present structural and electrical properties of SnO2:F thin films deposited on glass substrate by the spray pyrolysis technique. The precursors of SnO2: F were synthesized by a sol-gel method, starting from a SnCl4 center dot 5H(2)O/ethanol mixture and using NH4F/H2O as a dopant. Different properties were observed depending on the deposition time of the films. The structural characteristics of the layers, like crystal size, preferential growth orientation and mosaicity, were studied by X-ray diffraction. These results were compared and correlated with those obtained from electrical measurements, such as carrier density, Hall mobility and resistivity. We have found that for longer deposition times, the mosaicity of the crystallites increases. This process is accompanied by a decrease in the resistivity. (C) 2013 Elsevier B.V. All rights reserved.

【 授权许可】

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