Nanomechanical and nanotribological behaviors of hafnium boride thin films

THIN SOLID FILMS

卷:595

Article

Chowdhury, Shahla^1,4  Polychronopoulou, Kyriaki^1,2  Cloud, Andrew³  Abelson, John R.³  Polycarpou, Andreas A.^1,4 

[1] Univ Illinois, Dept Mech Sci & Engn, Urbana, IL 61801 USA

[2] Khalifa Univ Sci Technol & Res, Dept Mech Engn, Abu Dhabi, U Arab Emirates

[3] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA

[4] Texas A&M Univ, Dept Mech Engn, College Stn, TX 77843 USA

关键词: Hafnium boride;    Nanocoating;    Nanomechanics;    Nanowear;    XPS;    SEM;   

DOI  :  10.1016/j.tsf.2015.10.030

来源: Elsevier

【 摘 要 】

Nanocrystalline HfB2, HfBN and multilayer HfB2/HfBN films were deposited using chemical vapor deposition. Half of the amorphous as-deposited films were subjected to annealing at 700 degrees C to obtain their annealed equivalent samples. Nanoindentation and nanoscratch experiments were performed to measure their mechanical properties, friction and scratch/wear behavior. The annealed films showed higher hardness values compared to the as-deposited films, with the HfB2 film exhibiting the highest hardness. All three films exhibited similar shear strength around 3 GPa for as-deposited and 5.5 GPa for annealed films, implying reduced delamination propensity for the annealed samples. The annealed HfBN and multilayer HfB2/HfBN films exhibited lower friction and wear, compared to the rest of the films. Specifically, the annealed multilayer HfB2/HfBN films, exhibited an order of magnitude lower wear, compared to the HfB2 films, making them excellent candidates for low friction and low wear hard coating applications. (C) 2015 Published by Elsevier B.V.

【 授权许可】

Free