Influence of Fe(Cr) miscibility on thin film grain size and stress

THIN SOLID FILMS

卷:612

Article

Zhou, Xuyang¹  Kaub, Tyler¹  Martens, Richard L.¹  Thompson, Gregory B.¹ 

[1] Univ Alabama, Dept Met & Mat Engn, Tuscaloosa, AL 35487 USA

关键词: Stress evolution;    Thin films;    Iron alloy;    Chromium alloy;    Atom probe tomography;    Segregation;   

DOI  :  10.1016/j.tsf.2016.05.024

来源: Elsevier

【 摘 要 】

During the post coalescence portion of thin film deposition, thin film stress is related to the grain size and adatom mobility of the depositing material. Using a Fe(Cr) alloy thin film, the manipulation of the tensile stress for thick films was studied as a function of Cr solute content up to 8 at.%. Solute concentrations up to 4 at.% resulted in an approximate 50% increase in grain size that resulted in a reduction of the tensile stress to be lower than either elemental film. Upon increasing the Cr content, the grain size refined and the tensile stress of the films increased. Atom probe characterization of the grain boundaries confirmed Cr chemical partitioning which refined the grain size and altered the film's texture, both of which contributed to the change in film stress. The use of intrinsic segregation, rather than deposition processing parameters, appears to be another viable option for regulating film stress. (C) 2016 Elsevier B.V. All rights reserved.

【 授权许可】

Free