Film thickness dependence of microstructures and magnetic properties in single-layered FePt films by in-situ annealing

THIN SOLID FILMS

卷:519

Article; Proceedings Paper

Chen, S. C.^2,3  Sun, T. H.¹  Chang, C. L.^2,3  Shen, C. L.⁴  Kuo, P. C.⁴  Chen, J. R.¹ 

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

[2] Ming Chi Univ Technol, Dept Mat Engn, Taipei 243, Taiwan

[3] Ming Chi Univ Technol, Ctr Thin Film Technol & Applicat, Taipei 243, Taiwan

[4] Natl Taiwan Univ, Inst Mat Sci & Engn, Taipei 106, Taiwan

关键词: Single-layered FePt films;    Perpendicular magnetic anisotropy;    In-situ annealing;    Film thickness;   

DOI  :  10.1016/j.tsf.2011.01.210

来源: Elsevier

【 摘 要 】

The FePt films with various thicknesses (t) of 5 to 50 nm are deposited on Si(100) substrate without any underlayer by in-situ annealing at substrate temperature (Ts) of 620 degrees C. A strong (001) texture of L1(0) FePt film is obtained and presents high perpendicular magnetic anisotropy as the film thickness increases to 30 nm. By further increasing the thickness to exceed 30 nm, the (111) orientation of L1(0) FePt is enhanced greatly, indicating that the quality of perpendicular magnetic anisotropy degrades when the thickness of the FePt film is greater than 30 nm. The single-layered FePt film with thickness of 30 nm by in-situ depositing at 620 degrees C shows good perpendicular magnetic properties (perpendicular coercivity of 1033 kA/m (13 kOe), saturation magnetization of 1.08 webers/m(2) and perpendicular squareness of 0.91, respectively), which reveal its significant potential for perpendicular magnetic recording media. (C) 2011 Elsevier B.V. All rights reserved.

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