Metasurfaces for the infrared spectral range fabricated using two-photon polymerization

THIN SOLID FILMS

卷:721

Article

McLamb, Micheal¹  Li, Yanzeng²  Stinson, Paige¹  Hofmann, Tino¹ 

[1] Univ North Carolina Charlotte, Dept Phys & Opt Sci, Charlotte, NC 28223 USA

[2] Univ Chicago, Dept Chem, 5735 S Ellis Ave, Chicago, IL 60637 USA

关键词: Optics;    Plasmonics;    Metamaterials;    Metasurfaces;    Photolithography;    Microfabrication;   

DOI  :  10.1016/j.tsf.2021.138548

来源: Elsevier

【 摘 要 】

Fabrication of metasurfaces is often time consuming and expensive, involving complex lithographic processes. The maskless fabrication of metasurfaces composed of rectangular Au bars is reported as a suitable alternative, providing cost-effective, rapid prototyping of metasurfaces. The investigated metasurfaces were fabricated using a simple three-step process which is discussed in detail. The fabrication process establishes a simple method for producing high fidelity 2D patterns suitable to synthesize metasurfaces for chemical sensing, beam steering, and perfect reflection/transmission. Comprehensive polarization-sensitive reflection data reveal multiple resonances in the infrared spectral range. In addition to the dipole and substrate resonances, a resonance which is attributed to a coupling between the excitation of the metasurface and the substrate phonon mode is observed.

【 授权许可】

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