Chemical vapor deposition of novel carbon materials

THIN SOLID FILMS

卷:368

Article; Proceedings Paper

Chow, L ; Zhou, D ; Hussain, A ; Kleckley, S ; Zollinger, K ; Schulte, A ; Wang, H

关键词: chemical vapor deposition;    diamond;    carbon;    scanning electron microscopy;   

DOI  :  10.1016/S0040-6090(00)00763-X

来源: Elsevier

【 摘 要 】

Nanocrystalline diamond thin films have been prepared using hot filament CVD technique with a mixture of CH4/H-2/Ar as the reactant gas. We demonstrated that the ratio of H-2 to Ar in the reactant gas plays an important role in control of the grain size of diamonds and the growth of the nanocrystalline diamonds. In addition, we have investigated the growth of carbon nanotubes from catalytic CVD using a hydrocarbon as the reactant gas. Furthermore, focused ion beam technique has been developed to control the growth of carbon nanotubes individually. (C) 2000 Elsevier Science S.A. All rights reserved.

【 授权许可】

Free