3D characterization of microstructured poly(methacrylic acid) thin films via Mach-Zehnder interference microscopy

THIN SOLID FILMS

卷:519

Article

Letsche, S.^2,3  Jacobs, P.¹  Pluntke, M.⁴  Traenkle, S.^2,3  Gong, H.^2,3  Marti, O.⁴  Mahlmann, D. M.¹  Loosen, P.⁵  Volkmer, D.^2,3 

[1] Incelltec GmbH, D-52074 Aachen, Germany

[2] Univ Augsburg, Inst Phys, Chair Solid State Chem, D-86159 Augsburg, Germany

[3] Univ Ulm, Inst Inorgan Chem Mat & Catalysis 2, D-89081 Ulm, Germany

[4] Univ Ulm, Inst Expt Phys, D-89081 Ulm, Germany

[5] Rhein Westfal TH Aachen, D-52074 Aachen, Germany

关键词: Mach-Zehnder interferometry;    Atomic force microscopy;    Polymer brushes;    Thin films;   

DOI  :  10.1016/j.tsf.2011.05.045

来源: Elsevier

【 摘 要 】

We demonstrate the adaption of a further developed Mach-Zehnder interference (MZI) microscope for the rapid 3D characterization of transparent microstructured polymer thin films. In order to quantify the accuracy of the Mach-Zehnder interferometer, comparative film thickness measurements of photolithographically patterned poly(methacrylic acid) polymer brushes are performed employing two alternative techniques: white light profilometry (WIM) and atomic force microscopy (AFM). When the refractive index of the polymer brushes is calculated from MZI data, we obtain a good agreement with results received from an independent method (ellipsometry). In contrast to surface probing techniques such as AFM or WIM. Mach-Zehnder interferometry is a transmitted light method that measures both surface height profiles and refractive index distributions. MZI thus enables the quantification of film homogeneity with respect to height and density variations at the lateral resolution of a refraction limited microscope. We conclude that MZI is an adequate tool for the rapid and non-destructive characterization of structured polymer thin films. This method should be particularly useful for production quality control of microstructured polymer thin films which possess great potential in electronic device fabrication and biotechnology. (C) 2011 Published by Elsevier B.V.

【 授权许可】

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