Rapid densification of sol-gel derived yttria-stabilized zirconia thin films

THIN SOLID FILMS

卷:589

Article

Veldhuis, Sjoerd A.¹  Brinks, Peter¹  ten Elshof, Johan E.¹ 

[1] Univ Twente, MESA Inst Nanotechnol, Inorgan Mat Sci Grp, NL-7500 AE Enschede, Netherlands

关键词: Thin films;    X-ray reflectivity;    Rapid thermal annealing;    Yttria-stabilized zirconia;    Solid oxide fuel cell;   

DOI  :  10.1016/j.tsf.2015.06.036

来源: Elsevier

【 摘 要 】

A method based on X-ray reflectivity was used to study the densification behavior of 8 mol% yttria-stabilized zirconia for use in solid oxide fuel cells. Sol-gel derived thin electrolyte films were prepared via spin coating. Subsequent microwave-assisted rapid thermal annealing at 650-1000 degrees C resulted in crack-free 70 nm thin films. A maximum density of approximately 95% was achieved within 5 min at 1000 degrees C. X-ray photoelectron spectroscopy depth analysis on the thin films showed that the shorter annealing times, as opposed to conventional heating, resulted in lower Si concentrations at the top surface and at the substrate interface. (C) 2015 Elsevier B.V. All rights reserved.

【 授权许可】

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